High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Light weight and compact
Uniform baking temperature
High fluorine resistance
Low outgassing
Little heavy metal contamination
Options in:
Gray are not compatible with other selected option value.
Red conflict with another selected option value.
Amber are not recommended.
Downloads
The part number needs to be complete in order to view/download CAD Models.
Model does not exist, please email customer. with the complete part number, CAD file format and version required.