High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
High corrosion resistance to fluorine gas
Minimal outgassing
Minimal contamination from heavy metals
Optional heaters
Optional position sensors
Optional oxalic acid anodizing for internals
Options in:
Gray are not compatible with other selected option value.
Red conflict with another selected option value.
Amber are not recommended.
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